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中國有色金屬學報

ZHONGGUO YOUSEJINSHU XUEBAO

第32卷    第7期    總第280期    2022年7月

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文章編號:1004-0609(2022)-07-1991-15
金剛石顆粒表面磁控濺射鍍膜及熱處理工藝
王長瑞1, 2,田威1,胡俊山1,李波1,李鵬程1,林鐵松2,廖文和1

(1. 南京航空航天大學 直升機傳動技術重點實驗室,南京 210016;
2. 哈爾濱工業(yè)大學 先進焊接與連接國家重點實驗室,哈爾濱 150001
)

摘 要: 通過對金剛石顆粒表面進行鍍膜和熱處理,可解決高導熱金剛石/銅復合材料的界面潤濕和結合問題。本文研究了金剛石顆粒表面磁控濺射鍍覆改性金屬Mo和W以及不同熱處理工藝對鍍覆金剛石顆粒質量、表面形貌、微觀組織和相組成的影響規(guī)律。結果表明:磁控濺射后Mo鍍層呈現(xiàn)麥粒狀組織,而W鍍層為球形顆粒狀組織;在真空環(huán)境下熱處理時,熱處理溫度的增加會加速Mo或者W的升華速率,使得金剛石顆粒表面裸露在熱處理環(huán)境中而發(fā)生石墨化。在Ar環(huán)境下對鍍覆金剛石顆粒進行熱處理,900 ℃時還有少量Mo或者W單質相殘留在金剛石顆粒鍍覆表面,當溫度升高到950 ℃時金剛石顆粒出現(xiàn)了石墨化現(xiàn)象,但熱處理溫度為1000 ℃時形成了致密的MoCx和WCx相,消除了石墨化現(xiàn)象,并獲得了良好的熱處理界面。

 

關鍵字: 金剛石/銅復合材料;熱處理工藝;微觀組織;金剛石石墨化;相組成

Magnetron sputtering coating and heat treatment process of diamond copper particles
WANG Chang-rui1, 2, TIAN Wei1, HU Jun-shan1, LI Bo1, LI Peng-cheng1, LIN Tie-song2, LIAO Wen-he1

1. National Key Laboratory of Science and Technology on Helicopter Transmission, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China;
2. State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin 150001, China

Abstract:The surface coating and heat treatment of diamond particles can solve the problem of high performance interface wetting and combination of high thermal conductivity diamond/copper composites. In this paper, the effects of magnetron sputtering surface coating modified metals Mo and W, and different heat treatment processes on the mass, surface morphology, microstructure and phase composition of coated diamond particles were studied. The results show that Mo coating presents wheat grain structure after magnetron sputtering, while W coating has spherical grain structure; In vacuum environment, with the increase of heat treatment temperature, the sublimation rate of Mo or W will be accelerated, and graphitization will occur on the surface of diamond particles exposed in the environment of heat treatment. After heat treatment of coated diamond particles in Ar environment. At 900 ℃, small amount of Mo or W remains on the plated surface of diamond particles, respectively. Graphitization of diamond particle occurs when the temperature rises to 950 ℃. However, dense MoCx and WCx phases form when the heat treatment temperature is 1000 ℃. The graphitization phenomenon is eliminated and a good heat treatment interface is obtained.

 

Key words: diamond/copper composites; heat treatment process; microstructure; diamond graphite; phase composition

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

主管:中國科學技術協(xié)會 主辦:中國有色金屬學會 承辦:中南大學
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