(1. 貴研鉑業(yè)股份有限公司 稀貴金屬綜合利用國家重點實驗室，昆明 650106；
2. 昆明貴金屬研究所，昆明 650106)
摘 要: NiPt合金濺射靶材是半導體工業(yè)制備NiPtSi接觸層的重要原材料。本文對NiPt5合金在冷軋過程中的結構演變及磁性能進行研究。結果表明：NiPt5合金在冷軋過程中微觀結構的演變經(jīng)歷位錯纏結、位錯壁、含小角晶界的拉長亞晶粒、新晶界形成4個階段。晶粒細化主要是位錯的聚集、湮滅和重排所導致。NiPt5的矯頑力隨著軋制變形量的增加而增加，這歸因于冷軋誘導的缺陷及內(nèi)應力對疇壁移動的阻礙。剩磁與NiPt5合金擇優(yōu)取向密切相關，(200)織構導致剩磁升高。Ni合金較高的磁各向異性使 取向的織構對提高靶材質量十分有利。
關鍵字: 濺射靶材；NiPt合金；冷軋；位錯；磁性能
（1. State Key Laboratory of Advanced Technologies for Comprehensive Utilization of Platinum Metals, Kunming 650106, China;
2. Kunming Institute of Precious Metals, Kunming 650106, China）
Abstract:Nickel-platinum (NiPt) alloy sputtering target was used in semiconductor industries for the formation of Ni-Pt-silicide to realize the contact and interconnection function. The microstructure evolution and magnetic properties of NiPt5 alloy were studied during cold-rolling process. The results show that, during the cold-rolling process, the microstructure evolution of NiPt5 alloy includes four stages: dislocation entanglement, dislocation wall, elongated sub-grain with small angle grain boundary, and the formation of new grain boundary. The grain refinement is mainly attributed to the accumulation, annihilation and rearrangement of dislocations. The coercivity of NiPt5 increases with increasing the rolling deformation, which is attributed to the defects and internal stress induced by cold rolling that can obstruct the movement of domain wall. The remanence is closely related to the preferred orientation of the NiPt5 alloy. (200) plane texture leads to the increase of remanence. The high magnetic anisotropy of Ni alloy makes plane texture enable to improve the quality of target material.
Key words: sputtering target; NiPt alloy; cold rolling; dislocation; magnetic properties
