(哈爾濱工業(yè)大學(xué) 機(jī)電工程學(xué)院，哈爾濱 150001)
摘 要: 微納器件已經(jīng)廣泛應(yīng)用于光學(xué)、電子、醫(yī)學(xué)、生物技術(shù)、通信、航空航天等領(lǐng)域，研究金屬材料在納米尺度下的變形特性及材料的去除機(jī)理對實(shí)現(xiàn)微納器件的功能具有重要意義。利用分子動(dòng)力學(xué)(Molecular dynamics, MD)模擬方法可以實(shí)現(xiàn)對納米加工過程的“實(shí)時(shí)在線”觀察，從而能夠更好地理解金屬材料的納米加工機(jī)理。從納米壓痕和納米加工兩個(gè)方面，闡述近年來金屬材料納米加工機(jī)理的研究進(jìn)展，指出目前MD模擬方法的一些不足并提出幾個(gè)改進(jìn)建議。
關(guān)鍵字: 分子動(dòng)力學(xué)；金屬材料；加工機(jī)理；納米切削；納米壓痕
（School of Mechanical and Electrical Engineering, Harbin Institute of Technology, Harbin 150001, China）
Abstract:Micro-nano devices are widely used in the fields of optics, electronics, medicine, biotechnology, communication, aerospace and other fields. It is of great significance to study the deformation characteristics of metallic materials at the nanometer scale and the removal mechanism of materials to realize the function of micro-nano devices. Molecular Dynamics (MD) simulation methods can be used to achieve "real-time online" observation of nanofabrication process, so as to better understand the nanofabrication mechanism of plastic materials. From the aspects of nanoindentation and nanofabrication, the research progress of nanomaterial processing mechanism of metallic materials in recent years was expounded. Some shortcomings of current MD simulation methods were pointed out and several suggestions for improvement were put forward.
Key words: molecular dynamics; metallic material; processing mechanism; nano-cutting; nanoindentation
