(浙江工業(yè)大學(xué) 材料科學(xué)與工程學(xué)院，杭州 310032)
摘 要: 采用非平衡磁控濺射離子鍍技術(shù)在M2工具鋼和單晶Si表面沉積CrMoAlN梯度薄膜，并在靜態(tài)空氣中進(jìn)行600、700、800、900 ℃的高溫氧化實驗。采用XRD、SEM、XPS、納米壓痕和劃痕實驗等研究，結(jié)果表明：CrMoAlN薄膜呈現(xiàn)與CrN相似的面心立方結(jié)構(gòu)，主要以CrN、AlN和γ-Mo2N形態(tài)存在。經(jīng)800 ℃氧化2 h后，CrMoAlN薄膜基本保持常溫時的晶體結(jié)構(gòu)與力學(xué)性能。隨著氧化溫度繼續(xù)升高，薄膜表層的MoO3加速揮發(fā)，破壞由Cr2O3和Al2O3組成的致密氧化層，薄膜表面出現(xiàn)細(xì)小孔隙，薄膜氧化程度加劇。經(jīng)900 ℃氧化2 h后，CrMoAlN薄膜的力學(xué)性能和膜/基結(jié)合強度均出現(xiàn)明顯下降。
關(guān)鍵字: CrMoAlN梯度薄膜；磁控濺射；微觀結(jié)構(gòu)；高溫氧化
（Faculty of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310032, China）
Abstract:CrMoAlN gradient coatings were deposited on M2 and silicon wafers by closed-field unbalanced magnetron sputtering ion plating(CFUMSIP)technique, and their high-temperature oxidation behaviours were studied after static oxidation tests in air at different temperatures (600, 700, 800, 900 ℃) for 2h. The chemical composition, structural, hardness and adhesive/cohesive strength of the coatings were characterized by EDS, XRD, XPS, SEM, nanoindentation and scratch test. The experimental results show that CrMoAlN coatings exhibit a single phase cubic structure. After oxidation at 800 ℃ for 2 h, the CrMoAlN coatings still retain basically their crystalline structure and mechanical properties. The volatilization reaction rate of MoO3 increases, the dense and protective oxide layer consisting of Cr2O3 and Al2O3 is broken. The porous become clearly observable on the surface of the coating, which provides fast diffusion paths for oxygen and cations, and thus promotes the growth rates of oxide scales. After oxidation at 900 ℃ for 2 h, the mechanical properties and adhesive strength decrease drastically.
Key words: CrMoAlN gradient coating; magnetron sputtering; microstructure; high temperature oxidation
