(上海大學(xué) 材料科學(xué)與工程學(xué)院，上海 200072)
摘 要: 在不同光發(fā)射譜(OEM)條件下，采用閉合場(chǎng)非平衡磁控濺射技術(shù)(CFUBMSIP)在SDC99冷作模具鋼表面沉積CrTiAlN涂層，采用X射線衍射儀(XRD)、顯微硬度儀、原位納米力學(xué)測(cè)試系統(tǒng)和銷盤摩擦磨損試驗(yàn)機(jī)(POD)測(cè)試分析涂層的相結(jié)構(gòu)、表面硬度以及耐磨損性能。結(jié)果表明：各條件下制備的CrTiAlN涂層均為FCC結(jié)構(gòu)，且在(200)晶面擇優(yōu)取向；光發(fā)射譜值為65時(shí)，制備的CrTiAlN涂層具有較高的表面承載能力以及膜基結(jié)合力，納米硬度和彈性模量分別為22.7 GPa和276.4 GPa；OEM65制備的CrTiAlN涂層較OEM70、OEM80制備的CrTiAlN涂層具有更低的摩擦因數(shù)和磨損率，表現(xiàn)出更佳的摩擦磨損性能。
關(guān)鍵字: CrTiAlN涂層；光發(fā)射譜；SDC99冷作模具鋼；非平衡磁控濺射；磨損
（School of Materials Science and Engineering, Shanghai University, Shanghai, 200072, China）
Abstract:Under different conditions of optical emission monitor (OEM), the CrTiAlN coatings were deposited on cold-work die steel SDC99 by closed-field unbalanced magnetron sputtering ion plating (CFUBMSIP) technique. The microstructural, mechanical and tribological properties of coatings were characterized by means of X-ray diffractometry (XRD), microhardness tester, nano indenter test system and pin-on-disc (POD) tribometer. The experimental results show that all of CrTiAlN coatings exhibit FCC crystal structure with (200) preferred orientation. Compared to the coatings deposited under OEM values of 65 and 80, CrTiAlN coatings prepare under OEM value of 65, which shows higher bearing capacity and adhesive force between the coating and the substrate, and the nanohardness and elastic modulus are 22.7 GPa and 276.4 GPa, respectively, as well as a lower friction coefficient and wear rate.
Key words: CrTiAlN coating; optical emission monitor; cold work die steel SDC99; closed-field unbalanced magnetron sputtering; wear
