(廣東工業(yè)大學(xué) 機(jī)電工程學(xué)院，廣州 510006)
摘 要: 采用電弧離子鍍制備不同氧含量的Cr-Al-Si-O-N涂層，研究氧含量對(duì)納米復(fù)合涂層的組織結(jié)構(gòu)和力學(xué)性能的影響。結(jié)果表明：隨著氧氮流量比從0增加到25%時(shí)，涂層中的氧含量從0增加到51.8%(摩爾分?jǐn)?shù))，而氮含量從33.5%逐漸減少到9.8%；CrAlSiON涂層主要以面心立方結(jié)構(gòu)的(Cr,Al)N固溶體形式存在，其擇優(yōu)取向?yàn)?111)和(200)。隨著氧含量的增加，涂層的硬度呈先增加后減小的趨勢(shì)；當(dāng)氧氮流量比為10%時(shí)，硬度達(dá)到最大值3349 HK。由于氧化物的存在，含氧涂層在高溫高速的摩擦中表現(xiàn)出優(yōu)異的性能，具有較低的摩擦因數(shù)。
關(guān)鍵字: Cr-Al-Si-O-N；電弧離子鍍；氧含量；組織結(jié)構(gòu)；力學(xué)性能；高溫摩擦
（School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou 510006, China）
Abstract:Cr-Al-Si-O-N coatings with different oxygen contents were deposited by cathode arc ion plating. The effects of oxygen contents on the microstructure and mechanical properties of the nano-composite coatings were investigated. The results indicate that the oxygen content in the films increases from 0 to 51.8% (mole fraction) while the nitrogen content decreases from 33.5% to 9.8% with increasing the flow ratio of O2/(O2+N2) from 0 to 25%. The CrAlSiON coatings are mainly comprised of FCC-(Cr,Al)N solid-solution structures, (111) and (200) preferred crystalline orientation exists in the films. With the increase of oxygen contents, the hardness shows a trend of decrease after the first increase, and the highest film hardness is 3349 HK at the flow ratio of O2/(O2+N2) of 10%. As a result of the existence of oxide, the oxygen coatings remain lower friction coefficient, and show excellent performance at high temperature and high speed friction.
Key words: Cr-Al-Si-O-N; multi-arc ion plating; oxygen content; microstructure; mechanical property; high temperature friction
