(杭州電子科技大學(xué) 機(jī)械工程學(xué)院，杭州 310018)
摘 要: 采用不同濃度的丙烷通過(guò)準(zhǔn)穩(wěn)態(tài)流化床化學(xué)氣相沉積(FBCVD)工藝在1250~1450 ℃的沉積溫度下產(chǎn)生低溫各向同性熱解炭(LTIC)，利用SEM和TEM研究沉積溫度和丙烷濃度對(duì)LTIC微觀結(jié)構(gòu)的影響。結(jié)果表明：沉積溫度和丙烷氣體濃度對(duì)低溫各向同性熱解炭的形貌結(jié)構(gòu)有較大的影響。隨著沉積溫度或丙烷氣體濃度的升高，各向同性熱解炭形貌結(jié)構(gòu)由片層狀向類球形顆粒狀轉(zhuǎn)變，密度和織構(gòu)降低，而這些變化與芳香碳平面的彎曲度發(fā)生變化有關(guān)。增大密度和提高形核率是獲得性能優(yōu)異各向同性熱解炭的一個(gè)重要途徑，沉積溫度選擇1350 ℃，丙烷濃度保持在25%~40%之間，所獲得的熱解炭結(jié)構(gòu)和性能較為優(yōu)異。
關(guān)鍵字: 低溫?zé)峤馓浚桓飨蛲裕怀练e條件；微觀結(jié)構(gòu)
（School of Mechanical Engineering, Hangzhou Dianzi University, Hangzhou 310018, China）
Abstract:The low temperature isotropic pyrocarbon (LTIC) was prepared by a quasi-steady-state fluidized bed chemical vapor deposition (FBCVD) at deposition temperature of 1250-1450 ℃ with propane at different concentrations. The effects of deposition temperature and propane concentration on the microstructure of the LTIC were investigated by scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The results show that the deposition temperature and propane concentration have great influence on the fracture surfaces and texture of LTIC. As the deposition temperature and propane concentrations raising, the fracture surfaces of LTIC change from laminar structure to globular-like structure with decreasing the density and texture, which are correlated to variations in the tortuosity of the aromatic carbon layers. The increase of the density and nucleation rate is an important way to get isotropic pyrocarbon with excellent properties, when the deposition temperature is controlled at 1350 ℃ with 25%-40% propane concentrations, the structures and properties of LTIC are excellent.
Key words: low temperature pyrocarbon; isotropic; deposition condition; microstructure
