(1. 西北稀有金屬材料研究院 寧夏特種材料重點實驗室，石嘴山 753000；
2. 國家鉭鈮特種金屬材料工程技術(shù)研究中心，石嘴山 753000；
3. 中色(寧夏)東方集團(tuán)有限公司，石嘴山 753000)
摘 要: 研究分散劑、pH 值和固相含量對銦錫氧化物(ITO)漿料穩(wěn)定性、流變性的影響，以及粉漿澆注壓力對坯體密度的影響。結(jié)果表明：當(dāng)聚丙烯酸(PAA)質(zhì)量分?jǐn)?shù)為0.5%、聚乙二醇(PEG) 質(zhì)量分?jǐn)?shù)為1.5%、pH 值為9、ITO固相含量為70%(質(zhì)量分?jǐn)?shù))時，調(diào)制的漿料的流變性和穩(wěn)定性最佳，并在注漿壓力為1.5 MPa 的條件下制備出相對密度為68%的高密度粉漿澆注坯體；對該素坯進(jìn)行常壓燒結(jié)制備了相對密度高于99.5%的ITO 靶材。對靶材的組織與成分分析發(fā)現(xiàn)，粉漿澆注ITO 靶材的結(jié)構(gòu)為氧化錫完全固溶于氧化銦的單一立方In2O3 結(jié)構(gòu)，同時In、Sn和O 元素分布均勻，無元素富集現(xiàn)象，晶粒尺寸均勻，完全滿足八代以上鍍膜線的應(yīng)用技術(shù)要求。
關(guān)鍵字: ITO 靶材；粉漿澆注；漿料性能； 微觀組織
（1. Ningxia Key Laboratory for Special Metal Materials,
Institute of North West Rare Metal Materials,Shizuishan 753000,China;
2. National Engineering Research Center of Tantalum and Niobium Materials,Shizuishan 753000,China;
3. CNMC Ningxia Orient Group Co.,Ltd.,Shizuishan 753000,China）
Abstract:The effects of additives,pH value and solid content on the stability and rheology of indium tin oxide (ITO) slurry were studied,and the effect of slip casting pressure on the bulk density was investigated. The results show that the slurry with 70% ITO solid content (mass fraction) is very stable and easy to form the ITO green-body with a relative density of 68% under casting pressure of 1.5 MPa when the parameters of forming slurry are fixed at w(PAA)=0.5% (PAA is polyacrylic acid),w(PEG)=1.5% (PEG is polyethylene glycol) and pH=9. The ITO target materials with relative density higher than 99.5% are achieved using the green-body mentioned above by pressureless sintering. The structure of ITO target material is the cubic structure of indium oxide,and the grain size and the elements of In,Sn and O well distribute. The ITO target materials reach the quality for the application in G8 TFT-LCD production line.
Key words: ITO target material; slip casting; slurry property; microstructure
