(中南大學(xué) 冶金與環(huán)境學(xué)院，長沙 410083)
摘 要: 采用XRD、SEM和XRF等表征方法研究In2O3、SnO2及其混合粉(In2O3與SnO2質(zhì)量比為9:1)在N2、空氣及O2氣氛下于1 300~1 600 ℃燒結(jié)過程中的粉末分解質(zhì)量損失、反應(yīng)固溶、新相生成及孔洞形成等行為，以期為高密度銦錫氧化物(ITO)靶材制備奠定基礎(chǔ)。結(jié)果表明：在1300~1600 ℃高溫?zé)Y(jié)中，In2O3和SnO2均分解升華， SnO2較In2O3更易于分解，增大燒結(jié)氣氛的氧分壓，有利于抑制分解反應(yīng)的發(fā)生；在O2氣氛下，ITO粉在1 500 ℃開始顯著分解產(chǎn)生質(zhì)量損失；ITO粉在N2、空氣和O2氣氛中于1 300 ℃下燒結(jié)4 h，樣品中均存在SnO2相；于 1 400 ℃下燒結(jié)4 h，SnO2相消失，In4Sn3O12相出現(xiàn)；隨著燒結(jié)溫度的進(jìn)一步升高，In4Sn3O12分解消失，其分解溫度隨燒結(jié)氣氛氧分壓增大而提高；在O2氣氛下燒結(jié)，所得ITO粉晶格常數(shù)最低，且較為穩(wěn)定，顆粒收縮較均勻，有利于高密度ITO靶材制備。
關(guān)鍵字: In2O3；SnO2；燒結(jié)行為
（School of Metallurgy and Environment, Central South University, Changsha 410083, China）
Abstract:The sintering behaviors, such as the decomposition and mass loss, reactive solid solution, generation of new phases and holes of In2O3 and SnO2 as well as their mixed (mass ratio of In2O3 to SnO2 9:1) powders, were studied in the temperature range of 1 300~1 600 ℃ under the atmospheres of N2, air and O2 by means of characterization methods of XRD, SEM, XRF, and so on, in order to lay the foundation for preparing high density ITO targets. The results show that, during the sintering processes in the temperature range of 1 300~1 600 ℃, both In2O3 and SnO2 may decompose and sublime. Compared to In2O3, SnO2 powders are easier to decompose, increasing oxygen partial pressure of the sintering atmosphere is beneficial to inhibiting their decompositions, and under O2 atmosphere, ITO powders begin to decompose and lose mass until as high as 1 500 ℃. After sintering under atmospheres of N2, air and O2 for 4 h, SnO2 still exists in ITO powders at 1 300 ℃, and at 1 400 ℃, phase SnO2 will disappear with the formation of a new phase, In4Sn3O12. With the further increase of sintering temperature, phase In4Sn3O12 will disappear, and the higher the oxygen partial pressure of the sintering atmosphere is, the higher the temperature is, in which phase In4Sn3O12 disappears. In case of sintering under O2 atmosphere, the lattice parameters of ITO powders obtained are the lowest and more stable, and moreover, the particle shrinkage during sintering is also more uniform, which are beneficial to preparing high density ITO targets.
Key words: In2O3; SnO2; sintering behavior
