(1. 常州大學(xué) 材料科學(xué)與工程學(xué)院，常州 213164；
2. 蘇州科技學(xué)院 化學(xué)與生物工程學(xué)院，蘇州 215011)
摘 要: 以經(jīng)過聚乙烯吡咯烷酮(PVP)進(jìn)行表面修飾的聚苯乙烯(PS)微球為內(nèi)核，在堿性條件下采用溶膠-凝膠法在PS微球直接包覆SiO2，制備有機(jī)/無機(jī)PS/SiO2復(fù)合微球，通過控制反應(yīng)體系中正硅酸乙酯(TOES)的濃度來控制復(fù)合微球中氧化硅的質(zhì)量分?jǐn)?shù)，并借助原子力顯微鏡(AFM)考察了PS/SiO2復(fù)合磨料對硅熱氧化片的拋光特性，初步分析有機(jī)/無機(jī)復(fù)合磨料的非剛性力學(xué)特性對拋光質(zhì)量的影響。透射電鏡(TEM)結(jié)果顯示：復(fù)合微球具有草莓狀核殼包覆結(jié)構(gòu)，其氧化硅殼層是由SiO2納米顆粒所組成；熱失重分析(TGA)表明：樣品中氧化硅含量為12%~69%(質(zhì)量分?jǐn)?shù))。AFM測試結(jié)果表明：復(fù)合磨料中氧化硅的含量對拋光后晶片的微觀形貌、粗糙度及表面輪廓具有明顯的影響。
關(guān)鍵字: 核殼結(jié)構(gòu)；復(fù)合微球；磨料；聚苯乙烯；氧化硅
（1. School of Materials Science and Engineering, Changzhou University, Changzhou 213164, China;
2. Department of Chemistry and Bioengineering, Suzhou University of Science and Technology, Suzhou 215011, China）
Abstract:The polyvinylpyrrolidone (PVP) modified polystyrene (PS) microspheres were first synthesized by soap-free emulsion polymerization method, and the SiO2 nanoparticles were subsequently coated on the surfaces of the PS cores by sol-gel method in alkaline NH4OH/ethanol solutions. The silica content of composite microspheres can be controlled by adjusting the concentration of tetraethoxysilane (TEOS) in the reaction system. The oxide chemical mechanical polishing (CMP) behavior of as-prepared PS/SiO2 composite abrasives was investigated by atomic force microscopy (AFM). The effect of non-rigid mechanical property of organic/inorganic composite abrasives on the CMP behavior was also discussed. TEM results show that the composite microspheres exhibits core/shell structure with strawberry-like morphology, and the silica shell is composed by SiO2 nanoparticles. Thermogravimetric analysis (TGA) results indicate that the silica contents in the composite microspheres range from 12% to 69% (mass fraction). AFM tests results indicate that there is obvious effect of the silica content of the composite abrasives on the roughness values, topographies and profilograms of the polished wafer surfaces.
Key words: core/shell structure; composite microsphere; abrasive; polystyrene; silica
