Abstract:A reuse fabrication module using micro electrochemistry (MECM) with a round-ball tool to remove the defective In₂O₃SnO₂ thin film from the surfaces of digital paper display was presented. The etching effect improves that the number of the round-balls decreases for promoting the concentration of electric power and increasing discharge space. Using a small size of the round-ball tool takes less time for the same amount of In₂O₃SnO₂ layer removal since the effect of MECM is easily developed for supplying of sufficient electrochemical power. A higher feed rate of the poly ethylene terephthalate (PET) diaphragm combines with enough electric power to drive fast etching rate. A pulsed direct current can improve the effect of dreg discharge and is advantageous to couple this current with the fast feed rate of the workpiece. Through the ultra-precise etching of In₂O₃SnO₂, the optoelectronic semiconductor industry can effectively reuse the defective products, reducing production costs. This precision etching process is of high efficiency and requires only a short period of time to remove the In₂O₃SnO₂ nanostructures.

Key words: thin film; round-ball tool; In₂O₃SnO₂; micro electrochemistry; digital paper display