(中南大學 粉末冶金國家重點實驗室，長沙 410083)
摘 要: 通過冷態(tài)輸送ZrCl4粉末，利用低壓化學氣相沉積法在C/C復合材料表面制備ZrC涂層。采用X射線衍射和掃描電鏡研究沉積溫度和沉積位置對ZrC涂層物相成分和微觀形貌的影響。結果表明：在1 400~1 600 ℃時，沉積涂層物相均為單一的ZrC。ZrC晶粒擇優(yōu)取向隨沉積溫度的升高而發(fā)生變化；在1 400和1 500 ℃時，ZrC晶粒擇優(yōu)取向面為(200)；1 600 ℃時，晶粒擇優(yōu)取向面轉變?yōu)?220)和(200)，且擇優(yōu)不明顯；隨著沉積溫度的進一步升高，涂層晶粒尺寸明顯增大，涂層表面ZrC顆粒由球形逐漸轉變?yōu)榻鹱炙味嗝骟w。在1 400~1 600 ℃沉積時，反應器的−100~ −230mm沉積區(qū)間內(nèi)可以得到成分單一、擇優(yōu)取向一致、表面形貌相同的ZrC涂層。
關鍵字: ZrC涂層；低壓化學氣相沉積；相組成；顯微組織；均勻性
（State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China）
Abstract:ZrC coatings were deposited on C/C composites by low pressure chemical vapor deposition (LPCVD) at different temperatures, and the ZrCl4 powders were transported in solid state. X-ray diffractometry and scan electron microscopy were employed to investigate the effects of deposition temperature and position on the phases and surface morphologies of ZrC coatings. The results show that the coatings are composed of cubic ZrC in the temperature range from 1 400 ℃ to 1 600 ℃. The preferred orientation of the ZrC coatings varies with the growth temperature increasing. At 1 400 and 1 500 ℃, the preferred orientation of the ZrC coating is (200), but it changes to (220) and (200) at 1 600 ℃. As temperature increasing, the grain size increases and the shape of the grains changes from spherical to tetrahedral pyramid. Within the temperature range from1 400 ℃ to 1 600 ℃, the ZrC coatings with uniform phase, orientation and surface morphology are deposited in the reactor scale from −100 mm to −230 mm.
Key words: ZrC coating; low pressure chemical vapor deposition; phase composition; microstructure; homogeneity
