HFCVD金剛石膜生長(zhǎng)的影響
(1. 中南大學(xué) 材料科學(xué)與工程學(xué)院，長(zhǎng)沙 410083；2. 中南大學(xué) 粉末冶金國(guó)家重點(diǎn)實(shí)驗(yàn)室，長(zhǎng)沙 410083)
摘 要: 采用熱絲化學(xué)沉積法在高速鋼基體上沉積金剛石薄膜。為了減少石墨的形成、增強(qiáng)膜基結(jié)合強(qiáng)度，沉積前先使用滲鉻熱處理在高速鋼表面制備一層碳化鉻中間層。采用場(chǎng)發(fā)射掃描電子顯微鏡、X射線衍射儀、激光拉曼光譜和洛氏硬度計(jì)對(duì)滲鉻基體和金剛石膜進(jìn)行檢測(cè)分析，研究滲鉻熱處理對(duì)高速鋼基體與金剛石膜的物相組織、結(jié)構(gòu)形貌和附著性能的影響。結(jié)果表明：滲鉻熱處理能在鋼基表面形成一層致密的富Cr層，此過(guò)渡層能有效提高金剛石的形核率，在滲鉻鋼基表面形成連續(xù)致密的高質(zhì)量金剛石膜，但該金剛石膜的應(yīng)力較大，1 471N載荷的壓痕測(cè)試導(dǎo)致薄膜嚴(yán)重破壞，說(shuō)明膜基結(jié)合強(qiáng)度有待進(jìn)一步提高。
關(guān)鍵字: 金剛石膜；高速鋼；化學(xué)氣相沉積；滲鉻熱處理；附著性能
W18Cr4V high-speed steel on growth of diamond films by HFCVD
（1. School of Materials Science and Engineering, Central South University, Changsha 410083, China;
2. State Key Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China）
Abstract:Diamond films were grown on high-speed steel substrates by hot filament chemical vapour deposition (HFCVD) method. A chromium carbide coating prepared by high temperature diffusion chromizing pretreatment was used as an intermediate layer on the steel substrates to minimize the early formation of graphite and to enhance the diamond film adhesion. The characteristics of the chromizing pretreated high-speed steel and the diamond films were analyzed by X-ray diffractometer (XRD), field emission scanning electron microscope (FE-SEM), micro-Raman spectroscope and Rockwell hardness indentation to investigate the effects of chromizing pretreatment on the morphology, structure and adhesion of the substrate and diamond films. The results show that chromizing high speed steel results in the formation of a Cr-rich layer on the substrate surface, which leads to a much improved nucleation density, and formation of smooth, dense, good quality , diamond films, but the thermal stress of diamond films is large, Rockwell indentation testing with 1 471N shows serious damage, implying that the adhesion of these films is not good enough.
Key words: diamond films; high-speed steel substrates; chemical vapour deposition; chromizing heat treatment; adhesion performance
