(福州大學(xué) 材料科學(xué)與工程學(xué)院，福州 350108)
摘 要: 采用離子束濺射沉積(IBSD)法在聚酰亞胺襯底上沉積不同厚度Sm-Fe GMFs；采用磁致伸縮測(cè)量?jī)x測(cè)試制備態(tài)和不同溫度真空退火后薄膜懸臂梁結(jié)構(gòu)自由端偏轉(zhuǎn)量；利用赫姆霍茲系統(tǒng)測(cè)量制備態(tài)和真空退火后薄膜的幅頻特性。結(jié)果表明：在低頻(0~100 Hz)范圍內(nèi)，檢測(cè)到懸臂梁結(jié)構(gòu)Sm-Fe GMFs共振現(xiàn)象，薄膜經(jīng)過(guò)200 ℃真空退火后，其低場(chǎng)磁敏性明顯提高，在74.1 Hz的頻率下發(fā)生共振，其振幅可達(dá)到300 μm，比制備態(tài)時(shí)提高了約3倍；制備的Sm-Fe GMFs顯示出優(yōu)異的幅頻特性，振動(dòng)與驅(qū)動(dòng)電流的響應(yīng)曲線表現(xiàn)出很好的跟隨性。
關(guān)鍵字: Sm-Fe GMFs；懸臂梁結(jié)構(gòu)；低場(chǎng)磁敏性；頻率；振幅
cantilever beam structure Sm-Fe GMFs
（College of Materials Science and Engineering，F(xiàn)uzhou University，F(xiàn)uzhou 350108, China）
Abstract:Sm-Fe GMFs with different thickness were fabricated by ion beam sputtering deposition (IBSD) on polyimide substrate. The deflection of cantilever beam end and the amplitude-frequency characteristic for the as-deposited film and the films after vacuum annealing treatment at different temperatures were investigated by magnetostrictive measuring instruments. The results show that the resonant phenomenon for cantilever beam structure of Sm-Fe GMFs films are discovered at low frequencies range(0−100 Hz). The magnetic sensitivity in low magnetic field is improved obviously after vacuum annealing treatment at 200 ℃, the resonance frequency of the film is 74.1 Hz, and the value of the amplitude can reach 300 μm, about 3 times higher than that of the as-deposited film. Sm-Fe GMFs show excellent low frequency characteristic, and the curve of resonance behaves consistent with the driving current curve.
Key words: Sm-Fe GMFs; cantilever beam structure; low field magnetic sensitivity; frequency; amplitude
