(1.中南工業(yè)大學(xué)應(yīng)用物理及熱能工程系;
2.測試分析中心，長沙 410083)
摘 要:
關(guān)鍵字: 硅 抗彎強度 熱處理
（1.Department of Applied Physics and Heat Engineering,
2.Central South University of Technology, Changsha 410083）
Abstract:The effects of heat treatment temperature, time and cooling way on the flexure strength of ACZ and NCZ silicon wafers with various contents of oxygen and nitrogen were studied. The strength of silicon wafer was increased by the formation of silicon-oxygen and nitrogen-silicon-oxygen complexes and was decreased by the formation of silicon-oxygen and nitrogen-silicon-oxygen precipitates. A new two step cooling technique eliminating heat donor and preventing the decrease of strength was suggested.
Key words: silicon flexure strength heat treatment
