(大連大學(xué)機械系， 大連 116622)
摘 要: 選用4種不同的 N+注入劑量，即3×1017 、6×1017、9×1017和2×1018cm-2， 對 Ti-6Al-4V 合金進行離子注氮，使其表面形成一層改性層。通過俄歇電子能譜，分析了在鈦基合金上注入不同劑量的氮離子后，其表面原子的分布情況。結(jié)果表明：最大濃度時的深度RP 和最大相對濃度Cmax 并不隨注入劑量的增加而無限增大，注入劑量超過9×1017 cm-2 后， 最大濃度時的深度RP 將向試樣表面移動；注入劑量超過6×1017 cm-2 后，最大相對濃度Cmax 將保持平穩(wěn)狀態(tài)。
關(guān)鍵字: 離子注入 鈦基合金 俄歇電子能譜
（Department of Mechanical Engineering Dalian University, Dalian 116622）
Abstract:Ti-6Al-4V alloy was implanted in four kinds of nitrogen ion flux, 3×1017, 6×1017, 9×1017 and 2×1017 cm-2, to obtain a modification layer on its surface. The distribution of nitrogen atoms in the layer has been analyzed by means of Auger Electron Spectrum. The results show that the depth Rp corresponding to the maximum nitrogen concentration and the maximum relative nitrogen concentration Cmax do not rise limitlessly with the increase of nitrogen ion flux, and the Rp moves to the surface of the layer when nitrogen ion flux exceeds 9×1017 cm-2, Cmax remains stable when nitrogen ion flux exceeds 6×1017 cm-2.
Key words: ion implantation Ti-based alloy Auger Electron Spectrum
