(武漢工業(yè)大學(xué) 材料復(fù)合新技術(shù)國(guó)家實(shí)驗(yàn)室，武漢430070)
摘 要: 采用溶膠—凝膠工藝在玻璃表面制備了均勻透明的銳鈦礦型TiO2納米薄膜，其顆粒大小在40～80 nm。薄膜的X射線衍射分析表明，當(dāng)薄膜的厚度小于0.45μm時(shí)，薄膜中未出現(xiàn)明顯的銳鈦礦的衍射峰。X射線光電子能譜(XPS)和電子自旋共振譜(ESR)的實(shí)驗(yàn)結(jié)果表明：薄膜中除含有Ti，O元素外，還有一定量的來(lái)自有機(jī)前驅(qū)物中未完全燃燒的碳和少量從玻璃表面擴(kuò)散到薄膜中的Na和Ca元素；Ti元素除了以＋4價(jià)形式存在外，還有一定量的Ti以＋3和＋2價(jià)形式存在。TiO2 薄膜在530nm附近的寬吸收帶也證實(shí)了TiO2薄膜中低價(jià)鈦元素的存在。
關(guān)鍵字: TiO2納米薄膜；溶膠—凝膠工藝；表面結(jié)構(gòu)
（State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,
Wuhan University of Technology, Wuhan 430070, P.R.China）
Abstract:The uniform transparent anatase nanometer TiO2 thin films were deposited on glass substrates by sol-gel processing. The diameters of TiO2 particles in the thin films are in the range of 40～80nm. When the thickness of the films is lower than 0.45μm, XRD patterns of films show no peak of anatase. The chemical composition and the valency state of the film were analyzed with X-ray photoelectron spectroscopy(XPS) and electron spin resonance(ESR). Experiment results show that besides Ti and O elements, there is a certain amount of residual carbon from the starting organometallic components and a small amount of sodium and calcium ions diffused from the glass substrates. Although the valency state of Ti element mainly exist in oxides of Ti (Ⅳ), there is a certain amount of oxides of Ti(Ⅲ) and Ti(Ⅱ). The ultraviolet-visible spectra of the TiO2 thin films appear the wide adsorption band in the wavelength about 530nm, which further confirms that there are a certain amount of oxides of Ti(Ⅲ) and Ti(Ⅱ) in the TiO2 thin films.
Key words: TiO2 nanometer thin films; sol-gel processing; surface structure
