(1湖北汽車(chē)工業(yè)學(xué)院材料工程系，十堰 442002
2 華中理工大學(xué)材料科學(xué)與工程學(xué)院，武漢 430074
3 浙江大學(xué)材料科學(xué)與工程系，杭州 310027)
摘 要: 研究了離子鍍TiN涂層在500～700 ℃間的高溫氧化特性，并利用SEM觀察和XRD相分析研究了氧化產(chǎn)物的類(lèi)型及膜失效機(jī)制。結(jié)果表明，TiN膜的氧化遵循拋物線擴(kuò)散規(guī)律，其氧化產(chǎn)物為金紅石型TiO2。與M2和3Cr2W8V相比，TiN膜具有優(yōu)良的抗氧化性能。以M2為基體的TiN涂層抗氧化性能略高于以3Cr2W8V為基體的TiN涂層。
關(guān)鍵字: TiN膜 氧化 離子鍍
（1 Department of Materials Engineering, Hubei Automobile Industries Institute, Shiyan 442002, P. R. China
2 School of Materials Science and Engineering,
Huazhong University of Science and Technology, Wuhan 430074, P. R. China
3 Department of Materials Science and Engineering,Zhejiang University, Hangzhou 310027, P. R. China）
Abstract:The oxidation properties of TiN coating by ion plating at high temperature were investigated. By means of SEM and XRD, both the type of oxidation product and the failure mechanism of the coating were studied. Results showed that the oxidation of the TiN coating obeys a rule of parabolic diffusion and the oxidation product is rutile TiO2. Compared with matrix M2 or 3Cr2W8V, the TiN coating possesses much more better oxidation property. The oxidation resistance of TiN coating in the matrix of M2 is slightly better than that in the matrix of 3Cr2W8V.
Key words: TiN coating; oxidation; ion plating
