(1. 中國科學院力學研究所材料工程中心，北京 100080；
2. 太原理工大學表面工程研究所，太原030024)
摘 要: 對雙層輝光離子鎢鉬共滲在離子轟擊條件下形成的滲層和無離子轟擊時形成的滲層進行了對比，計算了溶質原子鎢和鉬與空位的結合能。據(jù)溶質-空位復合體擴散的能量條件，提出溶質-空位復合體擴散機制在雙層輝光離子鎢鉬共滲中起重要作用。由此解釋了雙層輝光離子鎢鉬共滲的W和Mo原子快速擴散現(xiàn)象和滲后冷卻中大量金屬間化合物在晶界的析出。
關鍵字: 離子轟擊；鎢鉬共滲；溶質-空位復合體；擴散
（1. Center of Material Engineering, Institute of Mechanics, Chinese Academy of Sciences, Beijing 100080, P.R.China;
2. Research Institute of Surface Engineering, Taiyuan University of Technology, Taiyuan 030024, P.R.China）
Abstract:The W-Mo alloy layers were obtained by double glow plasma surface alloying technique. The alloying results were compared between processing conditions: with or without ion bombardment on the surface of substrate. The binding energy of vacancy with the solute atoms of W and Mo was calculated. According to the energy condition of solute-vacancy complex diffusion, the mechanism of solute-vacancy diffusion played an important role in the double glow plasma surface alloying process. The results explained the high diffusion efficiency of W-Mo atoms in the alloying process and gave the precipitation of large quantity of intermetallics at grain boundaries during the cooling process after the alloying treatment.
Key words: ion bombardment; W-Mo surface alloying; solute-vacancy complex; diffusion
