(福州大學(xué) 材料科學(xué)與工程學(xué)院，福州 350108)
摘 要: 以離子束濺射沉積(IBSD)法制備的Sm-Fe系超磁致伸縮薄膜懸臂板為研究對(duì)象，通過(guò)ANSYS有限元分析法，對(duì)超磁致伸縮薄膜/蓋玻片襯底懸臂板自由端撓度值的大小進(jìn)行模擬計(jì)算，并模擬Sm-Fe薄膜、Sm-Fe/Fe復(fù)合膜的內(nèi)部磁化狀態(tài)。結(jié)果表明：在薄膜與襯底厚度比較小的情況下，懸臂板端點(diǎn)撓度值隨薄膜厚度的增加而線性增加，且與襯底厚度近似成二次拋物線關(guān)系，有限元分析結(jié)果與實(shí)測(cè)情況吻合較好；Sm-Fe單層膜內(nèi)部磁力線分布較均勻；在Sm-Fe/Fe復(fù)合膜中，由于Fe膜的負(fù)磁場(chǎng)效應(yīng)，使Sm-Fe膜內(nèi)的磁力線分布出現(xiàn)不均勻的現(xiàn)象，且磁感應(yīng)強(qiáng)度比Sm-Fe單層膜小。
關(guān)鍵字: Sm-Fe薄膜；離子束濺射；有限元；磁致伸縮
Sm-Fe system film cantilever
（College of Materials Science and Engineering, Fuzhou University, Fuzhou 350108, China）
Abstract:Sm-Fe system giant magnetostrictive films were prepared by ion beam sputtering. The bending property of the giant magnetostrictive film/glass substrate cantilever was studied by finite element modeling. The internal magnetic states of the giant magnetostrictive films were simulated. The finite element analysis results show that the deflection is in direct proportion to the film thickness and quadratic parabola to the substrate thickness when the film thickness is much less than the substrate thickness. The analysis results are well comparable to the experiment ones. The internal magnetic field of Sm-Fe single film is uniform. Inside the Sm-Fe/Fe composite film, because of the negative magnetic effect of Fe film, the internal magnetic field of Sm-Fe film becomes nonuniform, and the magnetic induction is less than that of the Sm-Fe single film.
Key words: Sm-Fe film; ion beam sputtering; finite element; magnetostrictive
