(太原理工大學(xué) 表面工程研究所， 太原 030024)
摘 要: 用雙層輝光放電在鈦合金Ti6Al4V表面形成了Mo-N硬質(zhì)鍍層。 用X射線衍射儀和納米壓入儀分別對鍍層的相結(jié)構(gòu)、 硬度和彈性模量進(jìn)行了研究，并用涂層壓入儀對鍍層與基體間的結(jié)合強度進(jìn)行了測定。 結(jié)果表明： Ti6Al4V表面形成了均勻的Mo-N硬質(zhì)鍍層， 鍍層厚約10μm， 由面心立方結(jié)構(gòu)Mo2N化合物構(gòu)成； Mo2N硬質(zhì)鍍層的硬度和彈性模量分別為13.80GPa和261.65GPa； 鍍層與基體間具有較好的結(jié)合強度。
關(guān)鍵字: 雙層輝光放電； 鈦合金； 鉬氮化合物
（Institute of Surface Engineering, Taiyuan University of Technology,
Taiyuan 030024, China）
Abstract:The Mo-N hard coating on Ti6Al4V substrate was formed by the double glow discharge technique. The phase, hardness and elastic modulus of the coating were analyzed with X-ray diffractometer and nano indentator respectively.The adhesive strength of the Mo-N hard coating/Ti6Al4V substrate system was investigated with coating indentator. The results show that, the thickness of Mo-N hard coating is about 10μm; the coating consists of fcc structure Mo2N; the hardness and elastic modulus of the coating are 13.80GPa and 261.65GPa respectively. The Mo-N hard coating/Ti6Al4V substrate system has good adhesive strength.
Key words: double glow discharge; Ti alloy; molybdenum nitride
