(1.北京科技大學(xué) 材料科學(xué)與工程學(xué)院， 北京 100083;
2.太原理工大學(xué) 表面工程研究所，太原 030024)
摘 要: 觀(guān)察了雙層輝光滲金屬過(guò)程中源極濺射后的成分以及形貌，利用X射線(xiàn)衍射對(duì)源極濺射表面進(jìn)行了相分析，并且用Thermo-cale軟件進(jìn)行了相計(jì)算。結(jié)果表明：在輝光濺射條件下源極的成分和形貌發(fā)生了較大的變化，濺射后源極表面主要析出相為μ相和Laves相，用Thermo-cale軟件熱力學(xué)相計(jì)算結(jié)果與X射線(xiàn)衍射結(jié)果基本吻合。
關(guān)鍵字: 雙層輝光；多元共滲；濺射
double glow plasma
（1.School of Materials Science and Engineering，
University of Science and Technology Beijing,
Beijing 100083，China;
2.Research Institute of Surface Engineering，
Taiyuan University of Technology，
Taiyuan 030024，China）
Abstract:The chemical compositions and morphologies of source cathode after sputtering by double glow plasma surface alloying technique were analyzed. The phases in sputtered surface were analyzed by XRD and calculated by Thermo-calc corresponded. The results show that considerable changes on compositions and morphologies occur in the source cathode at the glow plasma sputtering. μ phase and Laves phase are determined as the main precipitation in the source cathode surface after sputtering, and the calculation results are in agreement with XRD results.
Key words: double glow; multi-element surface alloying; sputtering
