注入改性層XPS研究
(哈爾濱工業(yè)大學(xué) 材料科學(xué)與工程學(xué)院，哈爾濱 150001)
摘 要: 用XPS(X射線光電子能譜)和GXRD(小掠射角X射線衍射)研究了鋁合金等離子體基離子注入氮再注入鈦最后復(fù)合注入氮和鈦改性層的成分分布及相結(jié)構(gòu)，并用Gaussian-Lorentzion峰位擬合方法分析了改性層中不同深度處各元素的化學(xué)態(tài)及其在相結(jié)構(gòu)中的分布。結(jié)果表明，復(fù)合改性層的表層有較高濃度的氮和鈦，次表層有較高濃度的鈦及一定濃度的氮，鋁/鈦界面有較寬的過渡區(qū)，基體中氮呈高斯分布。改性層主要由TiN，TiO2，α-Ti,TiAl3,Al2O3和AlN等組成,氮和氧還以固溶態(tài)的形式存在。最表層含有大量TiN及部分TiO2；次表層含有大量α-Ti及許多TiN；過渡層由TiO2,TiN,TiAl3,Al2O3和AlN等組成；注氮層包括AlN, Al2O3及α(Al)。各元素在相應(yīng)相結(jié)構(gòu)中的濃度分布與其成分深度分布基 本相似。
關(guān)鍵字: 鋁合金；離子注入；等離子體；XPS
aluminum alloy implanted with
nitrogen and titani um by
plasma based ion implantation
（School of Materials Science and Engineering，
Harbin Institute of Technology，Harbin 150001，China）
Abstract:The composition and structure of LY12 alloy imp lanted with N, then with Ti, finally with N and Ti by plasma based ion implantation (PBII) was characterized using X-ray photoelectron spectroscopy (XPS) and glancing X-ray diffractometry(GXRD). The chemical state of elements at various depth in the modified layer w as analyzed using Gaussian-Lorentzion fitting criterion. The depth profiles show that the modified layer can be divided into four parts: the surface layer with higher content of N and Ti, the subsurface one with higher content of Ti and lower content of N, the transition one containing Ti, Al, O and N , and the N-implanted one. GXRD shows that the modified layer consists of TiN, TiO2 , α-Ti, TiAl3, Al2O3 and AlN. The fitting results indicate that the surface layer contains most TiN and some TiO2, the subsurface one holds most α-Ti and much TiN, the transition one covers TiO2, TiN, TiAl3, Al2O3 and AlN, and the N-implanted one includes AlN, Al2O3 and α(Al). There are al so some N-solid solution and O-solid solution in the modified layer. The fitting results still show that the distribution of each element in the corresponding phase is similar to that of XPS depth profiles.
Key words: aluminum alloy；ion implantation；plasma；XPS
