(1. 華南理工大學(xué) 機(jī)械電子工程系， 廣州 510640；
2. 廣東工業(yè)大學(xué) 材料與能源學(xué)院， 廣州 510643)
摘 要: 研究了同時(shí)加入Fe與Cr進(jìn)行改性的(TiFeCr)N多元膜的高溫氧化行為。結(jié)果表明：當(dāng)氧化溫度高于600℃時(shí)，這種多元膜的氧化增質(zhì)均低于TiN膜；800℃氧化后膜層完整，沒(méi)有出現(xiàn)類(lèi)似TiN膜的局部脫落現(xiàn)象。基體對(duì)多元膜的氧化產(chǎn)物無(wú)明顯影響，700℃氧化后兩種基體上的多元膜均轉(zhuǎn)變?yōu)門(mén)iO2(金紅石)；但基體對(duì)TiN膜的氧化產(chǎn)物卻有明顯影響，在Cu基體上膜層的氧化產(chǎn)物由TiO2及少量Ti3O5 組成，而玻璃基體上膜層的氧化產(chǎn)物則由Ti3O5 及少量TiO2組成。
關(guān)鍵字: 多元膜； 離子鍍； 高溫氧化
（1. Department Mechanical and Electronic Engineering,
South China University of Technology, Guangzhou 510640, P.R.China;
2. Faculty of Materials and Energy Sources, Guangdong University of
Technology,Guangzhou 510643, P.R.China）
Abstract: The high-temperature oxidation behavior of (Fe+Cr) modified (TiFeCr)N films was investigated. The results show that the mass gains of the multi-component films at the higher oxidation temperatures, over 600℃, were lower than those of TiN films. There was no local spallation similar to TiN films after treatment at 800℃ for 1h. The substrates had no evident effect on oxidation products of multicomponent films. Multicomponent films on the two substrate transformed into TiO2(Rutile) after the treatment at 700℃ for 1h. However the substrate had an evident effect on that of TiN films. The transformed products of TiN films on copper substrate consisted of TiO2(Rutile) and a few Ti3O5 , while these on glass substrate consisted of Ti3O5 and a few TiO2.
Key words: multi-component films; ion plating; high-temperature oxidation
