(1. 西北工業(yè)大學(xué) 民航工程學(xué)院， 西安 710072；
2. 太原理工大學(xué) 表面工程研究所，太原 030024；
3. 西安交通大學(xué) 金屬材料強(qiáng)度國(guó)家重點(diǎn)實(shí)驗(yàn)室， 西安 710049)
摘 要: 將離子束增強(qiáng)沉積（IBED）技術(shù)與離子束濺射沉積技術(shù)相結(jié)合，在鈦合金表面制備了MoS2， MoS2-Ti復(fù)合膜。研究了膜層的形態(tài)、結(jié)構(gòu)、膜基結(jié)合強(qiáng)度、硬度、摩擦學(xué)性能及抗微動(dòng)（fretting）損傷性能。結(jié)果表明：所獲膜層較純?yōu)R射膜結(jié)合強(qiáng)度高、致密性好，復(fù)合膜中允許的金屬元素含量大。通過(guò)恰當(dāng)?shù)乜刂茝?fù)合膜中Ti的含量，可獲得以（002）基面擇優(yōu)取向的MoS2-Ti復(fù)合膜，該膜層有較好的減摩和抗磨綜合性能，能夠顯著地改善鈦合金的常規(guī)磨損、微動(dòng)磨損（FW）和微動(dòng)疲勞（FF）性能，特別是在磨損嚴(yán)重的大位移整體滑移條件下，MoS2-Ti復(fù)合膜對(duì)鈦合金FF抗力的提高作用可大于噴丸形變強(qiáng)化處理。
關(guān)鍵字: 鈦合金; 離子束增強(qiáng)沉積; MoS2復(fù)合膜; 摩擦磨損; 微動(dòng)疲勞; 噴丸強(qiáng)化
by ion-beam-enhanced deposition
（1. Civil Aeronautic Engineering College,
Northwestern Polytechnical University,Xi′an 710072, P.R.China;
2. Research Institute of Surface Engineering,
Taiyuan University of Technology, Taiyuan 030024, P.R.China;
3. State Key Laboratory for Mechanical Behavior of Materials,
Xi′an Jiaotong University, Xi'an 710049, P.R.China）
Abstract:MoS2 and MoS2-Ti composite films were produced on Ti alloy substrate by ion-beam-enhanced deposition (IBED) technique combined with ion-beam sputtering (IBS) method. The morphology, microstructure, bonding strength, hardness and constituent distribution of the films were studied. The wear resistance and the fretting damage behavior of Ti6Al4V alloy coated with the films were evaluated. It is found that the films become denser and harder and with higher bonding strength compared with sputtered films. The concentration of Ti dopant permitted in the films prepared by the present method is higher than that of sputtered films. As Ti dopant concentration is proper, the new method can produce basal orientation films with excellent tribological behavior. The optimized MoS2-Ti composite films can improve the resistance of wear and fretting damage (fretting wear and fretting fatigue) of Ti alloy significantly. Under the gross slip conditions with severe wear, the effect of the optimized MoS2-Ti composite film is even better than that of shot peening in improving fretting fatigue performance of Ti alloy.
Key words: titanium alloy; ion-beam-enhanced deposition; MoS2 composite film; friction and wear; fretting fatigue; shot peening
