(哈爾濱工業(yè)大學(xué) 材料科學(xué)與工程學(xué)院，哈爾濱 150001)
摘 要: 用X射線(xiàn)光電子能譜（XPS）和小掠射角X射線(xiàn)衍射（GXRD）研究了鋁合金LY12等離子體基離子注入氮/鈦改性層的結(jié)構(gòu)。結(jié)果表明，氮在注入層呈高斯分布，而鈦沿注入方向逐漸減少。鈦的注入對(duì)已注入的氮的分布有重要影響。鈦的等離子體密度直接影響鈦在改性層中的成分、相結(jié)構(gòu)。改性層主要由TiO2, Al2O3,AlN,TiAl3, TiN或Ti組成。
關(guān)鍵字: 鋁合金； 離子注入； 等離子體
implanted with N/Ti by PBII
（School of Materials Science and Engineering，
Harbin Institute of Technology，Harbin 150001, P.R.China）
Abstract:The structure of the aluminum alloy LY12 implanted with N/Ti by plasma based ion implantation (PBII) was characterized using X-ray photoelectron spectroscopy (XPS) and glancing X-ray diffraction (GXRD). XPS measurements show that N and Ti can be implanted into LY12 effectively, and the depth profile of N in the layer is near the Gaussian distribution, and that of Ti decreases gradually along the implanting direction. The process of implanting Ti has an important influence on the depth profile of the pre-implanted N. The plasma density of Ti can affect the composition and phases in the modified layer consisting of TiO2, Al2O3, AlN, TiAl3 TiN or Ti.
Key words: aluminum alloy；implantation； plasma
