(武漢工業(yè)大學(xué) 材料復(fù)合新技術(shù)國家重點實驗室，武漢 430070)
摘 要: 研究了基片預(yù)處理和工藝參數(shù)對微波等離子化學(xué)氣相沉積金剛石涂層WC-8.0%Co刀具質(zhì)量的影響，研究了提高成核密度和沉積速率的方法，用SEM，XRD，激光Raman光譜分析了金剛石涂層質(zhì)量，用切削試驗檢測金剛石涂層與刀具基底的附著情況。結(jié)果表明，在1∶3的稀鹽酸中酸洗15 min后用氨水浸泡10 min的基片處理方法能有效地抑制金屬鈷的溢出，從而提高金剛石涂層的質(zhì)量，并且使刀具使用壽命提高10倍以上。
關(guān)鍵字: WC-Co 刀具； 金剛石膜； 微波等離子化學(xué)氣相沉積
deposition diamond coating upon WC-Co tools
（State Key Laboratory of Advanced Technology for Materials Synthesis and Processing,
Wuhan University of Technology, Wuhan 430070, P.R.China）
Abstract:The effects of substrate pretreatment and processing parameters on the quality of microwave plasma chemical vapor deposition (MPCVD) diamond coating upon WC-8.0%Co tools, and the method to improve the nucleation density and deposition speed were studied. The diamond coatings were analyzed with SEM, XRD and laser Raman's spectrometer, the adhesion of diamond coating was measured by cutting test. The results show that it can effectively control the penetration of cobalt and improve the quality of diamond coating and improve tool's life by 10 times when the substrate is pretreated in the condition of acid leaching in dilute HCl for 15 min and then soaking in dilute ammonia solution for 10 min.
Key words: WC-8.0%Co tools; diamond coating; MPCVD
