李 放2，付青峰2，林 勤1
(1. 北京科技大學(xué) 理化系， 北京 100083;
2. 江西省科學(xué)院 應(yīng)用物理研究所， 南昌 330029)
摘 要: 利用組合的二次回歸正交實(shí)驗(yàn)設(shè)計(jì)方案，對(duì)鉭低溫離子滲氮條件下，表面物相及固溶體中氮的含量隨滲氮溫度、氣氛總壓力和氫氮摩爾比的變化進(jìn)行了系統(tǒng)研究。發(fā)現(xiàn)表面滲氮層由化合物Ta6N2.57、超晶格TaN0.1和固溶體相組成。氮在鉭中的固溶度隨氣壓、溫度和氫摩爾分?jǐn)?shù)的增加而增加，化合物和超晶格相含量隨溫度增加而增加，同時(shí)化合物相隨氫摩爾分?jǐn)?shù)增加有一個(gè)極大值，該極大值隨溫度增加而下降。
關(guān)鍵字: 鉭；離子滲氮；物相
ion-nitriding on phases structure of
nitriding layer of tantalum
LI Fang2，F(xiàn)U Qing-feng2，LIN Qin1
（1. Department of Physical Chemistry，University of
Sciences and Technology Beijing，Beijing 100083, China;
2. Institute of Applied Physics，Jiangxi Academy of
Sciences, Nanchang 330029, China）
Abstract:The change of phase forming and nitrogen content in ion-nitriding layer of tantalum，at relatively low temperature as compared with its high melting point，with temperature，total pressure and hydrogen mole fraction was systematic ally researched by quadratic orthogonal regression experimental design. It is found that the surface layer is composed of compound Ta6N2.57，superlattice TaN0.1 and solid solution of nitrogen in tantalum. The amount of compound， super lattice and nitrogen in tantalum increases with temperature rising. And the account of compound phase has a maximum with the increasing of hydrogen mole fraction，and this maximum decreases with the increasing of temperature.
Key words: tantalum；ion-nitriding；phase
