文章編號：1004-0609(2001)S2-0006-05
NiTi形狀記憶薄膜的應用及進展
吳廷斌， 江伯鴻， 漆 王睿
(上海交通大學 國家教育部高溫材料及測試開放實驗室，上海 200030)
摘 要: 介紹了當前國內(nèi)外NiTi薄膜在以微機電系統(tǒng)(MEMS)為主的諸多領(lǐng)域中的應用研究情況，分析了存在的問題，并展望了今后的發(fā)展前景。
關(guān)鍵字: NiTi薄膜； 形狀記憶合金； 研究； 應用； 進展
Advancement in application research on
NiTi shape memory thin films
NiTi shape memory thin films
WU Ting-bin, JIANG Bo-hong, QI Xuan
（Open Laboratory of Education Ministry for HighTemperature Materials and
Testing, Shanghai Jiaotong University, Shanghai 200030, P.R.China）
Abstract:A introduction to the latest progress in application research on NiTi shape memory thin film was made. Its potential application was prospected and some possible problems in future development was estimated.
Key words: NiTi thin film; shape memory alloy; research; application; advancement
