黃新民1， 李廣海2， 張立德2
( 1. 合肥工業(yè)大學(xué) 材料科學(xué)與工程學(xué)院，合肥 230009;
2. 中國科學(xué)院 固體物理研究所， 合肥 230031)
摘 要: 采用二次陽極氧化的方法， 制備出高度有序的氧化鋁有序陣列模板。 研究了熱處理工藝、 電解液濃度、 溫度等因素對(duì)氧化鋁有序陣列模板孔洞有序性的影響， 結(jié)合掃描電鏡和透射電鏡對(duì)其結(jié)構(gòu)、 形貌進(jìn)行觀察和表征， 討論了有序孔洞形核與長大、 自組織生長導(dǎo)致有序性的機(jī)理。 回顧和總結(jié)了近年來有關(guān)陽極氧化鋁模板的制備方法和國內(nèi)外有關(guān)陽極氧化鋁模板的應(yīng)用進(jìn)展。
關(guān)鍵字: 陽極氧化鋁; 納米有序陣列; 模板; 制備工藝
HUANG Xin-min1, LI Guang-hai2, ZHANG Li-de2
（ 1. Faculty of Materials Science and Engineering,
Hefei University of Technology, Hefei 230009, China;
2. Institute of Solid State Physics,
Chinese Academy of Sciences, Hefei 230031, China）
Abstract: The highly ordered template of alumina was prepared by means of twice anodic oxidation. The affecting factors involved in the ordered extent and pore size in porous anodic alumina template were concluded from heat process, electrolyte concentration and temperature, etc. Based on the observation and characterization of microstructure and morphology by scanning electron microscopy and transmission electron microscopy, the mechanisms were discussed about order pore of nucleation and growth and the ordered property leaded by self-organized growth. The development of preparation and applications of anodic alumina template was reviewed in recent years.
Key words: anodic alumina; nanoscale ordered array; template; fabrication precess
