(1. 鄭州大學(xué) 物理工程學(xué)院 材料物理教育部重點(diǎn)實(shí)驗(yàn)室，
鄭州 450052;
2. 華南理工大學(xué) 機(jī)械工程學(xué)院， 廣州 510641)
摘 要: 通過(guò)改變Cr靶電流強(qiáng)度, 在國(guó)產(chǎn)AIP-01型多弧離子鍍膜機(jī)上制備不同Cr含量的(Ti, Cr)N復(fù)合薄膜。 研究Cr的添加對(duì)薄膜硬度、 薄膜相結(jié)構(gòu)及晶格常數(shù)等性能的影響， 探討薄膜的硬化機(jī)理。 結(jié)果表明： Cr的加入可顯著提高復(fù)合薄膜的硬度， 顯微硬度可高達(dá)HV2665； 復(fù)合薄膜是以TiN為基的(Ti, Cr)N薄膜， 薄膜中沒(méi)有獨(dú)立的CrN和Cr2N相， 同時(shí)由于Cr的加入， 薄膜的擇優(yōu)取向從(111)晶面逐漸過(guò)渡到(200)晶面， 隨Cr靶電流的增大， 所得(Ti, Cr)N復(fù)合膜中出現(xiàn)單質(zhì)Cr。
關(guān)鍵字: TiN; (Ti, Cr)N; 離子鍍； 復(fù)合薄膜； 硬度； 相結(jié)構(gòu)
（1. Key Laboratory of Material Physics, Ministry of Education,
Zhengzhou University, Zhengzhou 450052, China;
2. College of Mechanical Engineering, South China University of Technology, Guangzhou 510641, China）
Abstract: (Ti, Cr)N composite films with different Cr contents were deposited with AIP-01 multi-arc ion plating by the method of changing the current of Cr target. The influences of Cr on the phase structure, hardness and lattice of the composite films were investigated. The strengthening mechanism of the film was discussed. The results show: the hardness of the composite films can be enhanced dramatically by the incorporation of Cr, and its hardness can reach HV2 665. The composite film is (Ti, Cr)N film based on TiN film. No CrN and Cr2N single-phase compounds exist in the composite film. The preffered orientation of the composite films changes from (111) to (200) because of the incorporation of Cr. With the increasing of Cr current, there exists simple substance Cr in (Ti, Cr)N composite films.
Key words: TiN; (Ti, Cr)N; ion plating; composite film; hardness; phase structure
