(中南大學(xué) 物理與科學(xué)技術(shù)學(xué)院, 長(zhǎng)沙 410083)
摘 要: 以直流磁控濺射制備了類(lèi)金剛石薄膜, 采用原子力顯微鏡（AFM）觀(guān)察薄膜的表面形貌, 采用俄歇電子能譜（AES）分析薄膜的化學(xué)鍵和電子結(jié)構(gòu)。 將參數(shù)D定義為俄歇電子能譜（AES）中最大正峰和最低負(fù)峰之間的距離, 用俄歇電子能譜中的D值求得不同沉積氣壓條件下制備的薄膜的sp2鍵的百分含量和sp2鍵與sp3鍵比率。 采用紫外-可見(jiàn)光透射光譜(UV-Vis)分析了薄膜的光吸收特性和光學(xué)帶隙。 結(jié)果表明：沉積氣壓低于0.8 Pa時(shí), sp2鍵的百分含量隨沉積氣壓的增大而減小；薄膜的光學(xué)性質(zhì)受光學(xué)帶隙的直接影響。
關(guān)鍵字: 類(lèi)金剛石薄膜； 光學(xué)性質(zhì)； 電子結(jié)構(gòu)； 俄歇電子能譜
（School of Physics Science and Technology,
Central South University, Changsha 410083, China）
Abstract: Diamond-like carbon (DLC) films were prepared by DC magnetron sputtering. The morphology and chemical bonding structure of the DLC films were investigated by atomic force microscopy (AFM) and auger electron spectroscopy( AES), respectively. A parameter ‘D’ defined as the distance between the maximum of positive going excursion and the minimum of negative going excursion was calculated in the derivative AES spectra. The values of ‘D’ were used to calculate the percentage of sp2 hybrid bonds and the ratio of sp2 to sp3. The optical transmission and absorption properties, and the optical band gap of the films were characterized by an UV-Vis spectrophotometer. The effects of the sputtering power density and the gas pressure on the optical character and optical band gap of the films were studied. The results indicate that beyond pAr=0.8 Pa, these values decrease with increasing deposition pressure, and the optical characteristic of the film is affected directly by optical band gap.
Key words: diamond-like carbon； optical property； electron structure； AES
