(北京師范大學 低能核物理研究所 射線束技術與材料改性教育部重點實驗室 北京市輻射中心，北京 100875)
摘 要: 采用MEVVA源離子注入設備進行了純銅表面鎳離子注入的改性實驗研究，采用透射電鏡和X射線衍射儀對改性層顯微組織進行分析表征。結果表明：隨著Ni離子注入劑量的增加，銅表面改性層發(fā)生一系列強化過程。納米硬度和摩擦磨損實驗結果表明：當注入劑量達到7.5×1017 ion/cm2時，注入層的硬度值可達基體的2倍，滑動摩擦因數僅為基體的47%。高劑量的離子注入是對純銅進行表面改性的一種有效的方法。
關鍵字: 鎳；銅；離子注入；表面改性
（Key Laboratory of Beam Technology and Material Modification of National Ministry of Education , Institute of Low Energy Nuclear Physics, Beijing Normal University, Beijing Radiation Center, Beijing 100875, China）
Abstract:The impact on the surface of pure copper performance with Nickel ion implantation was studied using MEVVA source ion implantation equipment. The microstructures of modified layer were analyzed by TEM and XRD. The results show that a series of strengthening process occur on the modified surface of copper with the increase of Ni ion implantation dose on surface of copper. The testing results of hardness and friction indicate that the surface hardness is 2 times as that of original copper surface when the ion implanted dose is 7.5×1017 ion/cm2, and the friction coefficient is only 47% of that of copper surface. It can be concluded that ion implantation on the surface of pure copper, especially strong current ion implantation, is an effective method of pure copper surface strengthening technology.
Key words: Ni; Cu; ion implantation; surface modification
