(北京有色金屬研究總院 先進(jìn)電子材料研究所，北京 100088)
摘 要:
關(guān)鍵字: ZrVFe吸氣劑；激活機理；殘氣
（Advanced Electronic Materials Institute, General Research Institute for Nonferrous Metals, Beijing 100088, China）
Abstract:During the activation process of ZrVFe getter, the variation for its surface composition and residual gases in the vacuum chamber were studied by XPS and quadrupole mass spectroscopy(QMS), respectively. The results show that the surface layer of the air-exposed ZrVFe getter is covered with H2O, CO2 and hydrocarbons, both Zr and V exist in the oxidized state, and vanadium oxide starts to reduce at 200 ℃. The activation results in the enrichment of Zr on the getter surface and the formation of the metallic carbides. H2O, CO2 and hydrocarbons sequentially desorb from the surface with the increase of temperature. H2 is the main gas which desorbs above 200 ℃ and O2 is not discovered. ZrO2 is reduced to near-metallic or metallic state because O in ZrO2 leaves the getter surface through diffusing into getter bulk.
Key words: ZrVFe getter; activation mechanism; residual gas
