(中南大學 材料科學與工程學院，長沙 410083)
摘 要: AlN陶瓷是一種新型的基板材料，具有優(yōu)異的電性能和熱性能，被譽為新一代高密度封裝的理想基板材料。介紹AlN陶瓷的典型性能和導熱機理；討論AlN粉末的5種合成方法：鋁粉直接氮化法、Al2O3碳熱還原法、化學氣相沉積法、溶膠−凝膠法、自蔓延高溫合成法和等離子化學合成法；分析AlN燒結(jié)助劑的選擇和5種燒結(jié)工藝：熱壓燒結(jié)、無壓燒結(jié)、放電等離子燒結(jié)、微波燒結(jié)及自蔓延燒結(jié)；闡述AlN基板的制備工藝及其影響因素。
關(guān)鍵字: AlN；導熱機理；合成；燒結(jié)；燒結(jié)助劑；基板
（School of Materials Science and Engineering, Central South University, Changsha 410083, China）
Abstract:Abstract: AlN is a new packaging material with excellent electrical and thermal mechanical. The typical properties and the heat conduction mechanisms of AlN ceramics were introduced. Five synthesis methods of AlN powder were discussed, namely direct nitrogenation of Al powder, carbothermal reduction of Al2O3, chemical vapor deposition, sol-gel method, self-propagating high-temperature synthesis and plasma chemical synthesis. The choice of AlN sintering additives and five sintering technologies were analysed, namely hot pressing sintering, pressureless sintering, spark plasma sintering, microwave sintering and self-propagating sintering. The preparation processes of AlN substrate and its influencing factors were expounded.
Key words: AlN ceramics; heat conduction mechanisms; synthesis; sintering; sintering additives; AlN substrate
