Transactions of Nonferrous Metals Society of China The Chinese Journal of Nonferrous Metals

您目前所在的位置:首頁 - 期刊簡介 - 詳細頁面

中國有色金屬學(xué)報

ZHONGGUO YOUSEJINSHU XUEBAO

第17卷    第5期    總第98期    2007年5月

[PDF全文下載]        

    

文章編號:1004-0609(2007)05-0775-08
YG13硼化處理后沉積氣壓對金剛石薄膜的影響
魏秋平1,余志明1,馬 莉2,游小龍1,
豐 杰1,吳曉斌1,劉王平1

(1. 中南大學(xué) 材料科學(xué)與工程學(xué)院,長沙 410083;
2. 中南大學(xué) 粉末冶金國家重點實驗室,長沙 410083
)

摘 要:

采用超高真空熱絲化學(xué)氣相沉積(HFCVD)系統(tǒng),以甲烷和氫氣為反應(yīng)氣體,在YG13(WC-13%Co)硬質(zhì)合金基體上沉積金剛石薄膜。用場發(fā)射掃描電子顯微鏡(FESEM)和X射線衍射儀(XRD)對金剛石薄膜進行檢測分析,研究YG13經(jīng)950 ℃、3 h硼化預(yù)處理后沉積氣壓對金剛石薄膜形貌和生長織構(gòu)的影響;通過壓痕法比較硼化與二步法兩種預(yù)處理方法對金剛石薄膜附著性能的影響。結(jié)果表明,基體經(jīng)硼化預(yù)處理后表面形成CoB、CoW2 B2、CoW3B3相;當沉積溫度為750~800 ℃,碳源濃度為3.3%時,薄膜表面形貌和生長織構(gòu)隨著沉積氣壓改變有明顯的變化;硼化預(yù)處理后所得樣品在1 500 N載荷下壓痕表現(xiàn)出良好的附著性能,較二步法預(yù)處理更加有效地改善了膜−基附著性能。

 

關(guān)鍵字: 金剛石薄膜;硬質(zhì)合金;硼化預(yù)處理;附著性能

Effect of ambient pressure on diamond films
on boronized WC-13%Cosubstrates
WEI Qiu-ping1, YU Zhi-ming1, MA Li2, YOU Xiao-long1, FENG Jie1, WU Xiao-bing1, LIU Wang-ping 1

1. College of Materials Science and Engineering, Central South University, Changsha 410083, China;
2. Key State Laboratory of Powder Metallurgy, Central South University, Changsha 410083, China

Abstract:The diamond films were deposited on boronized WC-13%Co substrates via hot filament chemical vapor deposition in a reactor with a background pressure of 10−6 Pa. The surface morphology, texture and adhesion of the diamond films were investigated by means of field emission scanning electron microscope, X-ray diffractrometry and Rockwell hardness tester, respectively. The results show that a surface layer of stable cobalt borides of CoB, CoW2 B2 and CoW3B3 formed at 950 ℃ can effectively reduce the diffusion of Co to the surface of cemented carbide substrates when diamond films are deposited. The surface morphology and texture of the diamond films are remarkably affected by the ambient pressure when the substrate temperature is 750−800 ℃ and the percent of CH4 is 3.3%. Compared with the two-step pretreatment, the boronizing is much better pretreatment to improve the adhesion.

 

Key words: diamond films; cemented carbide; boronizing pretreatment; adhesion

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

主管:中國科學(xué)技術(shù)協(xié)會 主辦:中國有色金屬學(xué)會 承辦:中南大學(xué)
湘ICP備09001153號 版權(quán)所有:《中國有色金屬學(xué)報》編輯部
------------------------------------------------------------------------------------------
地 址:湖南省長沙市岳麓山中南大學(xué)內(nèi) 郵編:410083
電 話:0731-88876765,88877197,88830410   傳真:0731-88877197   電子郵箱:f_ysxb@163.com  
灵山县| 湄潭县| 米脂县| 句容市| 江华| 潮州市| 天峨县| 岱山县| 山东| 汽车| 彰武县| 通渭县| 文山县| 通州市| 浮山县| 邯郸市| 乌恰县| 墨江| 郑州市| 河东区| 保山市| 贵溪市| 遵化市| 贵州省| 自贡市| 乡宁县| 小金县| 潢川县| 沙湾县| 连云港市| 荣成市| 和林格尔县| 西昌市| 咸宁市| 赣榆县| 广水市| 洪湖市| 华阴市| 如皋市| 通河县| 石台县|