Abstract:YBa₂Cu₃O_7−x (YBCO) superconducting film was fabricated on {001} LaAlO₃ (LAO) substrate by pulse laser deposition (PLD), and its microstructure was examined by high resolution X-ray diffraction technology (HRXRD), such as pole figure, rocking curve, reciprocal space mapping. The results show that the YBCO crystalline alignment is almost {001}_YBCO//{001}_LAO, á100ñ_YBCO//á100ñ_LAO besides 2% {001}_YBCO//{001}_LAO, á110ñ_YBCO//á100ñ_LAO. The out-plane alignment of YBCO is some spreading (the breadth is 0.75°). There are 90°±0.65°á110ñ twin domains in the film, which is caused by the high local stress and stress difference between á100ñ and á010ñ during the tetragonal to orthorhombic phase transition.

Key words: YBa₂Cu₃O_7−x; crystalline alignment; twin domain; phase transition; superconducting film