Abstract:A nano probe system which can measure precise micro parts or optical parts in nanometer range resolution and scratch contact force in mN scale was demonstrated. The nano probe was originally designed for on-machine measuring applications and one kind of contact type measuring probes was designed for miniaturized or microfactory system. It ideally should be of small size and able to measure surface topography in nanometer scale. A commercial capacitive displacement sensor was proposed. It was a new concept in nano probe systems which can measure the displacement of shaft driven by the variation of surface topography. The nano probe mainly consisted of three parts: a capacitive displacement sensor, a porous type air slide and , a contact probe part with various tip radiuses. The porous type air slide assured the shaft slided smoothly with controllable normal force in mN scale and had high positioning accuracy. The probe part which was directly in contact with target surface, can be applied to micro/nanoscale scratching as well as the measurement of sample topography by a simple tip change.

Key words: nano probe; displacement sensor; air slide; PCD tip