中國有色金屬學(xué)報(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 21 Special 1 March 2011 |
hybrid coating system
（1. National Core Research Center for Hybrid Materials Solution, Pusan National University, Busan 609-735, Korea;
2. School of Materials Science and Engineering, Pusan National University, Busan 609-735, Korea）
Abstract:A systematic investigation of the microstructure of CrAlCxN1−x coatings as a function of carbon contents was conducted. Quaternary CrAlCxN1−x coatings were deposited on Si wafers by a hybrid coating system combining an arc-ion plating technique and a DC reactive magnetron sputtering technique using Cr and Al targets in the Ar/N2/CH4 gaseous mixture. The effect of carbon content on microstructure of CrAlCxN1−x coatings was investigated with instrumental analyses of X-ray diffraction, X-ray photoelectron, and high-resolution transmission electron microscopy. The results show that the carbon content of CrAlCxN1−x coatings linearly increases with increasing CH4/(CH4/N2) gas flow rate ratio. The surface roughness of the CrAlCxN1−x coating layer decreases with the increase of carbon content.
Key words: CrAlCxN1−x coating; nanocomposite; microstructure; hybrid coating system
