Abstract:Nanosized amorphous Si3N4powders were prepared from the reaction between SiCl₄ and NH₃ in a RF plasma torch with a specific geometry. The experiments are aimed at studying the relationships between synthesis parameters and nitrogen content of the product, mass distributions of the product and the byproduct. The main experimental parameters included plasma power, the mole ratio of the reactants. The powder was characterized in terms of the chemical composition analysis and morphology observation. The crystallization behaviors were also investigated.

Key words: Si₃N₄　nanosized powder　thermal plasma method