Abstract:The effects of crystallization annealing temperature on phase transformation temperature and SME of Ti-rich NiTi thin films prepared by the magnetron-sputtering system were studied. The experimental results showed that the phase transformation sequence of Ti-rich NiTi thin films were P^→R^→M for cooling transformation, and R^→P and M^→P for heating one, while increasing the annealing temperature from 823K to 1 103 K, theR-phase transformation temperature T_P-R and T_R-P were nearly unchanged, the martensitic transformation temperatures, however, moved to higher temperature. A thin film with room temperature micro-structure consisting of almost wholeR-phase can be obtained by annealing at appropriate temperature (e.g. at 923 K), which possesses a stable transformation temperature, narrow hysteresis and a good SME. It is suitable for the application to the micro-machine elements.

Key words: NiTi alloy　film　crystallization　phase transformation