Transactions of Nonferrous Metals Society of China The Chinese Journal of Nonferrous Metals

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中國(guó)有色金屬學(xué)報(bào)(英文版)

Transactions of Nonferrous Metals Society of China

Vol. 9    No. 3    September 1999

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Sputtering of W-Mo alloy under ion bombardment
Li Chengming(李成明)1  Tian Linhai(田林海) 1  Xu Zhong(徐 重) 1  Xie Xishan(謝錫善) 2   Dong Jianxin(董建新) 2

1.Research Institute of Surface Engineering,Taiyuan University of Technology, Taiyuan 030024, P.R.China;
2.Department of Materials Science and Engineering,University of Science and Technology Beijing, Beijing100083,P.R.China

Abstract:The distribution of plasma density in the vicinity of the W-Mo alloy source in the process of double-glow discharge plasma surface alloying was diagnosed using the moveable Langmuir probe. The sputtering law, surface composition and morphological variation of the W-Mo alloy source was studied. The experimental results show that there exists obvious preferential sputtering on the surface of the W-Mo alloy source under the argon ion bombardment; the stable period is reached after a transitional period, and the preferential sputtering occurs in a definite range of composition(mole fraction): 70%~75%Mo, 22%~25%W; there appears segregation on the surface of the W-Mo alloy source.

 

Key words: metallic cementation; W-Mo alloy; preferential sputtering; ion bombardment

ISSN 1004-0609
CN 43-1238/TG
CODEN: ZYJXFK

ISSN 1003-6326
CN 43-1239/TG
CODEN: TNMCEW

主管:中國(guó)科學(xué)技術(shù)協(xié)會(huì) 主辦:中國(guó)有色金屬學(xué)會(huì) 承辦:中南大學(xué)
湘ICP備09001153號(hào) 版權(quán)所有:《中國(guó)有色金屬學(xué)報(bào)》編輯部
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