中國有色金屬學(xué)報(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 11 No. 1 February 2001 |
Elastic modulus of TiN film investigated with Kroner
model and X-ray diffraction
model and X-ray diffraction
ZHANG Ming(張 銘), SUN Hai-lin(孫海林), HE Jia-wen(何家文)
（State Key Laboratory for Mechanical Behavior of Materials,
Xi′an Jiaotong University, Xi′an 710049, P.R.China）
Abstract:The four-point bending method was applied to measure X-ray elastic constants(XEC) of (422) and (331) planes of TiN coating. Elastic Modulus and XECs of all the crystal planes were calculated by Kroner method. The results from the calculation and the experiment were compared. It is concluded that the XECs values of same film prepared by different techniques scatter a little because of the effects of stoichiometric proportion and microstructure of films.
Key words: elastic constants; fourpoint bending; X-ray diffraction; titanium nitride
