中國(guó)有色金屬學(xué)報(bào)(英文版)
Transactions of Nonferrous Metals Society of China
| Vol. 16 No. 5 October 2006 |
DENG Shui-feng(鄧水鳳)1, 2
（1. Faculty of Material and Photoelectronic Physics, Xiangtan University,
Xiangtan 411105, China;
2. Key Laboratory for Advanced Materials and Rheological Properties,
Ministry of Education, Xiangtan University, Xiangtan 411105, China;
3. College of Electronic Science and Engineering, Jilin University,
Changchun 130012, China）
Abstract: Europium-substituted bismuth titanate (Bi3.25Eu0.75Ti3O12) thin films were deposited on the Pt/Ti/SiO2/Si(111) substrates by metal-organic decomposition (MOD) method using a repeated coating/drying cycle. Effect of crystallization temperature on microstructure of Bi3.25Eu0.75Ti3O12 (BET) thin films was investigated by X-ray diffractometry(XRD), scanning electron microscopy (SEM) and Raman spectroscopy, and ferroelectric property was studied by Precision Workstation Ferroelectric Tester. The crystallinity of BET thin films is improved and the average grain size increases with the crystallization temperature from 600 to 750℃. Under 9 V applied voltage, the remnant polarization (2Pr) of BET thin films annealed at 700 ℃ is 50.7 μm/cm2, which is higher than that of the films annealed at 600, 650 and 750℃.
Key words: BET thin film; ferroelectric property; metal-organic decomposition; Bi-layered perovskite
